OVERVIEW
Automated test and measurement system for high-power semiconductor devices (hereinafter referred to as tester) designed for automated measurement and control of static and dynamic parameters of high-power semiconductor devices at the various stages of semiconductor production such as wafer and final testing.
The tester can be used both for validation and characterization purposes.
The tester consists of the following main blocks:
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Voltage and current source and measurement unit with up to 400 A output current
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Two-channel precision voltage and current source and measurement unit
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Six-channel reference voltage source
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Oscilloscope
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Arbitrary waveform generator
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DMM
Access to the terminals of the measurement-and-control units is carried out through special connectors located on the front panel of the tester. Through these connectors, it is possible to connect loadboards for different families of semiconductor devices. Through them, connection of switching and interface adapters is provided for different families of semiconductor devices. Daughter boards for a specific DUT are installed on the load board and provides interfacing the device with loadboard.
Using different types of loadboards provides testing DUT’s both packaged and on the wafer. The tester is a universal platform for testing a wide range of semiconductor devices such as: high-power diodes (FRD), bipolar transistors (BT), field-controlled transistors (MOSFETs), bipolar transistors with isolated gate (IGBT), thyristors, zener diodes, optocouplers, etc. Testing is performed in accordance with standards.